Compact tabletop design UV curing system, using 365nm UV-LED.
Whole 200mm / 8 inches wafers exposure with room temperature and low running cost.
Features
- Room temperature operation and low running cost, provided with 365nm UV-LED
- Compact tabletop size
- Easy operation
- LED unit error detection
- Single wafer process system, up to 8 inch
Specification
- Work size : Up to 200mm (8 inches) wafers
- Light source : UV LED
- Peak wavelength : 365nm
- Power : 100VAC 5A 50/60Hz
- N2 gas : 0.2 MPa / ø6mm quick fitting
- Exhaust : Built-in cooling fan / Normal exhaust line 50A
- Size : 460 (W) × 535 (D) × 325 (H) mm
- Weight : 45kg
Other Information
- Minimum Order Quantity: 1 piece