Batch Plasma Cleaning System

Philo is developed especially for those customers who need a standard platform which cane be customized to host different applications. The machine is built with excellent materials and all parts are inserted in a robust aluminium frame. The model PHILO is a compact plasma cleaning system suitable for batch operation. Philo is developed especially for those customers who need a standard platform which cane be customized to host different applications. The machine is built with excellent materials and all parts are inserted in a robust aluminium frame. The model PHILO is a compact plasma cleaning system suitable for batch operation. 

Typical applications are:

• Organic decontamination prior to wire bonding
• Adhesion promoter prior to moulding
• Adhesion promoter of die attach materials on substrates
• Flux removal from semiconductor packages , hybrids or automotive products
• General activation, cleaning and decontamination
• 3”, 4” ,6” and 8” wafer cleaning

Specification Dimensions:

• 900 x 1600 x 1500h mm
• Weight: 400 Kg
• Power: Single Phase 220-240 V 50 Hz, 2.0 KVA
• Air: Dry 3—6 bar
• Exhaust port: NW25
• Control: PLC (6” LCD Touch screen)
• CE Certified
• Safety covers and interlocks Chamber
• Material:  Aluminium
• Dimensions:  350 x 350 x 100h mm
• Maximum Product dimensions: Application dependent

 
Electrode system

• Material: Aluminium
• Geometry: planar
• Plasma type: Direct 

Pumping system

• BOC RV12 Fomblin Oil Pump

Gas system

• 1 gas lines with digital Mass Flow Controller

RF system

• 13.56 MHz 300W generator with auto tuner

 
Other Information

• Minimum Order Quantity: 1 piece