Cassette Cleaning System | TCC-803

Model TCC-803 casette cleaning system is a compact cleaning equipment for high-mix and low-volume production. The purpose is precision cleaning of wafer casette, carrier, box and so on, which are used in the high-end, high-value-added manufacturing process.

Diversification of semiconductor devices, design of rules in the nanometer scale, demand for greater yield under increasingly sophisticated environments. Contamination control is considered to be a critical issue in the resolution of such challenges.

Technovision's cassette cleaning system, Model TCC-803, provides the advanced cleaning know-how required to support these high-level cleaning tasks.

Features

• Precision: Cleaning Right and left rotation and moving up and down
• Powerful: cleaning Spray at right angles to the groove part
• Hot DIW : Cleaning by hot DIW built in heater
• Complete drying: Move to the drying chamber after draining 99% (water removal)
• Small foot-print: Upright design, space-saving
  

Operating capacity

• SMIF POD: 32 pcs/shift (8 hrs)
• 200 mm cassette: 106 pcs/shift (8 hrs)
• 150 mm cassette: 160 pcs/shift (8 hrs)
  

Other Information

• Minimum Order Quantity: 1 piece